GIGAfab – Plasma systems for single-wafer operation

Movie: Impression of the handling procedure inside a GIGAfab A300


This particular type of machine was initially designed for the treatment of 300mm wafers within the Frontend of semiconductor production. Following the trend of wafer level packaging, this plasma system was recently re-designed also for the utilization within the Backend area.

The video shows the procedure when the robot arm handles a 300mm wafer between Front Opening Unified Pod (FOUP) station, pre-aligner, plasma chamber, cooling station and finally back into the FOUP.

For further informations about Plasma Systems for the Semiconductor Industry please click here.


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PVA TePla AG
Im Westpark 10 - 12
D-35435 Wettenberg

Phone: +49 (0) 641/68690-0
Fax: +49 (0) 641/68690-800

Email unit Plasma: Plasma-info@pvatepla.com
Email unit Laser: Laser-info@pvatepla.com
Email unit VPD: VPD-info@pvatepla.com
Web: www.pvatepla-mps.com

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