We have installed the latest versions of our plasma systems in our application laboratories in Wettenberg near Frankfurt am Main and Jena as well as in Corona, California, USA. These three stations help us to assist our customers in the event of application problems or in the development of processes for new applications.
At our front-end laboratory, we maintain a class 100 cleanroom where our latest batch systems and the single-layer systems are in operation in various configurations for removal of photoresist or stretch-relief etching.
At the back-end laboratory, we also operate the batch systems and plasma systems for single strips, with microwave excitation as well as excitation above 13.56 MHz. In addition, the plasma system for edge etching of solar cells is here.
Application support for metrology systems with laser or surface contamination is carried out at our laboratories in Jena.
Our experienced application team is available to answer your questions. Please contact us with your problems so that we can offer you the relevant solution for the application concerned—either at our laboratory or on your premises.