Plasmaanlage GIGA 690

Batch Packaging Systems

Plasma System GIGA690

The plasma system GIGA 690 is the successor model to the PS400 and PS660 and has become well established on the market since its launch in 2008. As a low-pressure microwave plasma system, it is designed for the cleaning and activation of semiconductor components in chip packaging, including before die-attach, wire bonding, flip-chip underfilling, and encapsulation. To this end, microwaves of 2.45 GHz are introduced through a window into the vacuum chamber, where they generate a chemically reactive plasma. This process allows particularly fast and damage-free plasma treatment.

The system can be operated both in manual and automatic mode; its user-friendly software meets the SEMI standards.

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Plasma-info@pvatepla.com

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PVA TePla AG
Im Westpark 10 - 12
D-35435 Wettenberg

Phone: +49 (0) 641/68690-0
Fax: +49 (0) 641/68690-800

Email unit Plasma: Plasma-info@pvatepla.com
Email unit Laser: Laser-info@pvatepla.com
Email unit VPD: VPD-info@pvatepla.com
Web: www.pvatepla-mps.com

Immediate Contact

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You will receive a copy of your request in your inbox.
Please complete all fields marked with *.
Please solve the following question:
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PVA TePla AG
Im Westpark 10 - 12
D-35435 Wettenberg

Phone: +49 (0) 641/68690-0
Fax: +49 (0) 641/68690-800

E-Mail Bereich Plasma: Service.plasma.mps@pvatepla.com
E-Mail Bereich Laser: Service.laser.mps@pvatepla.com
E-Mail Bereich VPD: Service.vpd.mps@pvatepla.com
Web: www.pvatepla-mps.com

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