The growing miniaturization and output density of semiconductor components is resulting in increasingly high requirements for the cleanliness of starting materials. As well as reducing the efficiency of the components, the tiniest traces of foreign elements can significantly shorten their service life. The VPD systems from PVA Metrology & Plasma Solutions allow our customers to detect these trace elements before and during the process chain on the wafer with detection limits of up to 1E7 at/cm². As a result, disruptions to production can be identified at an early stage and unnecessary additional costs can be avoided. This means that MPS systems pay for themselves quickly.