Front End Systems
The front-end systems are plasma systems with manual or automatic loading that are available either as a cost-effective batch system or as a single-layer system for higher requirements in terms of process results. The systems are mostly used in the lithography of wafer fabrication in order to remove photoresist or to prepare the wafers for a subsequent step.
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Back End Systems
PVA Metrology & Plasma Solutions provides the systems as batch systems for plasma processes with multiple magazines simultaneously or as automated systems in which the strips are loaded from the magazine into the chamber in multiple tracks in parallel and processed. They are then loaded back into magazines depending on the preferred embodiment. There are a wide variety of applications for cleaning and activation, from wire bonding, BGA, and flip-chip processes to mold underfill and encapsulation of the finished components.
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