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• 1. Plasmasystems  
  Along the entire production process of the semiconductor industry, i.e. both in the front-end and the back-end, the plasma systems offer a wide range of result- and specification-oriented…  
• 2. PVA MPS  
  News TechnologiesDates & Fairs Show all notificationsOur MarketsSemiconductor Packaging Separation of the components located on the wafer; packaging into the various types of casings High…  
• 3. Certification  
  CertificationThe current document regarding certification according to ISO 9001:2015 is available for download here.  
• 4. Application Support  
  Application Support We have installed the latest versions of our plasma systems in our application laboratories in Wettenberg near Frankfurt am Main and Jena as well as in Corona, California, USA.…  
• 5. Contract Measurement  
  Contract Measurement At our application laboratory in Jena, we perform measurements on wafers and component structures made from various materials (Si, GaAs, GaN, SiC, InP, etc.) at the request…  
• 6. Glossary  
  Processes in front-end and back-end technologySolar-Cell Edge Etching Edge isolation is an important step in the manufacture of solar cells. Here, the doping on the edges is removed, as this…  
• 7. About PVA TePla MPS  
  About PVA MPS PVA Metrology & Plasma Solutions: the application experts for new technologies in the manufacture of semiconductor components. We specialize in understanding the processes…  
• 8. Overview  
  Metrology Systems for Efficient ProductionDetection of Contamination on Wafer SurfacesTechnology Fields In wafer processing as well as during packaging of the devices, our plasma systems…  
• 9. Batch Wafer Systems  
  Batch Wafer SystemsPlasma System GIGAbatch 360/380P The plasma systems GIGAbatch 360P and 380P are suitable for the most challenging requirements in the semiconductor industry and use the same…  
• 10. Batch Packaging Systems  
  Batch Packaging SystemsPlasma System GIGA690 The plasma system GIGA 690 is the successor model to the PS400 and PS660 and has become well established on the market since its launch in 2008. As a…