About PVA MPS PVA Metrology & Plasma Solutions: the application experts for new technologies in the manufacture of semiconductor components. We specialize in understanding the processes…
Our systems to analyse residual stress states SIREX application examples:Contact Us How can we help you? laser.mps@pvatepla.comMetrology Systems LaserSIRD Stress Measurement SIRD…
Service ContactService From on-site commissioning, essential repairs, and spare-part deliveries to conversions and retrofits in the event of changed requirements, we provide our customers with…
Contract Measurement At our application laboratory in Jena, we perform measurements on wafers and component structures made from various materials (Si, GaAs, GaN, SiC, InP, etc.) at the request…
News TechnologiesDates & Fairs Show all notificationsOur MarketsSemiconductor Packaging Separation of the components located on the wafer; packaging into the various types of casings High…
Our Products Our front end plasma systems remove organic layers or residual contamination quickly and effectively during any step of wafer processing, allowing the subsequent processes to run…
Our SystemsWSMS (Wafer Surface Measurement System) The WSMS system constitutes an enhancement of the WSPS series and combines VPD technology with the outstanding detection limits of the WSPS…
Our Single-Wafer SystemsPlasma System GIGAfab Modular The Plasma System GIGAfab Modular is a fully automatic single-wafer system geared towards applications in the LED and MEMS sector. A…
Batch Wafer SystemsPlasma System GIGAbatch 360/380P The plasma systems GIGAbatch 360P and 380P are suitable for the most challenging requirements in the semiconductor industry and use the same…
